400px|thumb|right|EDS spectrum of the mineral crust of the vent shrimp [[Rimicaris exoculata. Most of these peaks are X-rays emitted when electrons return to the K electron shell (K-alpha and K-beta lines). One peak is from the L shell of iron.]]

Energy-dispersive X-ray spectroscopy (EDS, EDX, EDXS or XEDS), sometimes called energy dispersive X-ray analysis (EDXA or EDAX) or energy dispersive X-ray microanalysis (EDXMA), is an analytical technique used for the elemental analysis or chemical characterization of a sample. It relies on an interaction of some source of X-ray excitation and a sample. Its characterization capabilities are due in large part to the fundamental principle that each element has a unique atomic structure allowing a unique set of peaks on its electromagnetic emission spectrum (which is the main principle of spectroscopy). The peak positions are predicted by Moseley's law with accuracy much better than experimental resolution of a typical EDX instrument.

To stimulate the emission of characteristic X-rays from a specimen a beam of electrons or X-ray is focused into the sample being studied. At rest, an atom within the sample contains ground state (or unexcited) electrons in discrete energy levels or electron shells bound to the nucleus. The incident beam may excite an electron in an inner shell, ejecting it from the shell while creating an electron hole where the electron was. An electron from an outer, higher-energy shell then fills the hole, and the difference in energy between the higher-energy shell and the lower energy shell may be released in the form of an X-ray. The number and energy of the X-rays emitted from a specimen can be measured by an energy-dispersive spectrometer. As the energies of the X-rays are characteristic of the difference in energy between the two shells and of the atomic structure of the emitting element, EDS allows the elemental composition of the specimen to be measured. Often, instead of X-ray emission, the excess energy is transferred to a third electron from a further outer shell, prompting its ejection. This ejected species is called an Auger electron, and the method for its analysis is known as Auger electron spectroscopy (AES).

  1. High count rates and processing,
  2. Better resolution than traditional Si(Li) detectors at high count rates,
  3. Lower dead time (time spent on processing X-ray event),
  4. Faster analytical capabilities and more precise X-ray maps or particle data collected in seconds,
  5. Ability to be stored and operated at relatively high temperatures, eliminating the need for liquid nitrogen cooling.

Because the capacitance of the SDD chip is independent of the active area of the detector, much larger SDD chips can be utilized (40&nbsp;mm<sup>2</sup> or more). This allows for even higher count rate collection. Further benefits of large area chips include:

  1. Minimizing SEM beam current allowing for optimization of imaging under analytical conditions,
  2. Reduced sample damage and
  3. Smaller beam interaction and improved spatial resolution for high speed maps.

Where the X-ray energies of interest are in excess of ~ 30 keV, traditional silicon-based technologies suffer from poor quantum efficiency due to a reduction in the detector stopping power. Detectors produced from high density semiconductors such as cadmium telluride (CdTe) and cadmium zinc telluride (CdZnTe) have improved efficiency at higher X-ray energies and are capable of room temperature operation. Single element systems, and more recently pixelated imaging detectors such as the high energy X-ray imaging technology (HEXITEC) system, are capable of achieving energy resolutions of the order of 1% at 100 keV.

In recent years, a different type of EDS detector, based upon a superconducting microcalorimeter, has also become commercially available. This new technology combines the simultaneous detection capabilities of EDS with the high spectral resolution of WDS. The EDS microcalorimeter consists of two components: an absorber, and a superconducting transition-edge sensor (TES) thermometer. The former absorbs X-rays emitted from the sample and converts this energy into heat; the latter measures the subsequent change in temperature due to the influx of heat. The EDS microcalorimeter has historically suffered from a number of drawbacks, including low count rates and small detector areas. The count rate is hampered by its reliance on the time constant of the calorimeter's electrical circuit. The detector area must be small in order to keep the heat capacity small and maximize thermal sensitivity (resolution). However, the count rate and detector area have been improved by the implementation of arrays of hundreds of superconducting EDS microcalorimeters, and the importance of this technology is growing.

See also

  • Electron probe microanalysis
  • Elemental mapping
  • Scanning electron microscopy
  • Transmission electron microscopy
  • Wavelength-dispersive X-ray spectroscopy
  • X-ray microtomography
  • X-ray spectroscopy

References

  • MICROANALYST.NET – Information portal with X-ray microanalysis and EDX contents
  • Learn how to do EDS in an SEM – an interactive learning environment provided by Microscopy Australia